Proses pembersihan yang baik untuk penyaduran perak vakum boleh meningkatkan tekanan muktamad peralatan

Proses pembersihan yang baik untuk penyaduran perak vakum boleh meningkatkan tekanan muktamad peralatan

During the use of vacuum coating equipment, parts will also be contaminated. This contamination is related to the conditions of use and the vacuum pump. For example: the inner wall of the vacuum coating machine will be polluted by the evaporation material; the mechanical pump oil of the vacuum pumping unit of the vacuum coating equipment is the source of pollution, and the equipment will form an obvious oil film inside the equipment after long-term operation. These contaminations will also affect the performance of the equipment and should be removed at any time. Especially the ultra-high vacuum multi-target magnetron + ion beam combined sputtering equipment, its ultimate pressure is 6.6x10-Pa, and the equipped vacuum pumping group is an ultra-high vacuum system. In ultra-high vacuum systems, the cleaning process is even more important. A good cleaning process can reduce material outgassing rates by orders of magnitude. For example, after the stainless steel is exposed to the atmosphere for a long time, without any treatment, the gas output rate after pumping for 1 hour is 2.7x10-Pa-L/s m2), and it can be reduced to 1.3x10-Pa-L/ after pumping for 4 hours after removing oil stains. Csm). After baking at 250℃ for 15h, the outgas rate is further reduced to 1.3x10-Pa-L/(sm>. Proses pembersihan yang baik boleh meningkatkan tekanan muktamad peralatan.

Penyaduran perak vakum terdiri daripada banyak bahagian yang berbeza

Peralatan salutan vakum terdiri daripada banyak bahagian yang berbeza, yang semuanya disiapkan oleh pelbagai proses mekanikal, seperti memusing, mengisar, mengetam, mengisar, membosankan, kimpalan, dan lain-lain. Dengan cara ini, permukaan bahagian itu pasti akan diwarnai dengan banyak bahan cemar seperti memproses gris, kesan peluh, pes penggilap, fluks, cip logam, gris dan sebagainya. Bahan pencemar ini tidak menentu dalam vakum dan menjejaskan tekanan muktamad dan kestabilan prestasi peralatan salutan vakum. Di samping itu, bahan pencemar menyerap sejumlah besar gas di bawah tekanan atmosfera, dan dalam persekitaran vakum, gas ini juga dibebaskan, yang merupakan faktor yang mengehadkan tekanan muktamad peralatan salutan vakum. Atas sebab ini, pencemaran mesti dikeluarkan sebelum bahagian dipasang.

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